Optics|WONIK QnC

Manufacturing division
for special lamps and essential
parts for industrial use.

The Optics Division develops and manufactures unique light sources and components for use in processes such as cleaning, surface modification, and sterilization in the technology sector including semiconductor, display, medical, and environmental technologies. The 172nm excimer vacuum UV lamp used in the cleaning process, in particular, has reinforced the Division's position as the exclusive localization partner for Samsung Display and LG Display, as well as supplying products to FPD producers in China and Taiwan. In the semiconductor field, we are developing and supplying parts such as a chemical liquid heating device and wafer oxide layer removal device, and in the medical and environmental fields, dental implant surface treatment using a wavelength of 172 nm, and a sterilization device that can directly irradiate light onto the human body using a wavelength of 222 nm. The Lamp Division will grow into a division specializing in the development of localization parts and light source technology.

Features

Production of excimer lamps for the display manufacturing process
- The Leader of Excimer Lamp in Korea
- Possession of development and manufacturing technology Know-how
Medical Application
- Developed the world's first dental implant surface modification device (applied 172nm lamp)
- Developed sterilization products using the Excimer Lamp
Manufacturing of parts/equipment for semiconductor processing
- Mass production of CS Heater, a chemical solution heating equipment
- Mass production of applicators for wafer oxide layer removal parts
Continual technology advancement and protection
- Currently, owning 33 patent applications (28 registered)

Main Products

Excimer lamp
Excimer lamp irradiator
Dental implant surface
treatment device
222nm sterilization lamp
CS Heater
Applicator

Excimer VUV Processing Characteristics

The Cleaning Principle of Excimer Lamps

01

Xe forms an Excited Dimmer (Excimer, Xe₂*) upon application of electricity
02

Xe₂* undergoes a ground-state transition to Xe and emits 172 nm vacuum UV radiation
03

172 nm vacuum UV radiation converts the atmosphere around the lamp to O₃
04

Contaminants in the treatment are dissociated by 172 nm UV radiation
05

Contaminants are vaporized into CO₂, H₂O, Ok, and so forth. by O₃ in the atmosphere

Excimer Lamp Characteristics

Before

AVERAGE ANGLE [º] 31.88
After

AVERAGE ANGLE [º] 2.80

High efficiency
Single wavelength
Instantaneous lighting
Uniform illuminance(~ ±10%)
Room temperature survey

Process

01 Cutting Product-specific standards compliance
02 Welding Bonding of light tubes
03 Annealing Elimination of stress created during light tube bonding
04 Exhaust Sealing of exhaust and gas

05 Aging Lighting test
06 Assembly Forming electrodes and assembling a base
07 Packing Final inspection and packaging

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What We Do

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Optics

The Optics Division develops specialized light sources and application technologies.